COMPARATIVE STUDY OF THE VISCOELASTICITY OF PARYLENE THIN FILMS FOR MEMS USING NANO-DMA AND MOLECULAR DYNAMICS

WS Sui and MS Duvieusart and JH Zhao and YC Tai and YK Lee, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 468-471 (2017).

We present a comparative study of the viscoelasticity of parylene C (PPXC) by using Nano-DMA (Dynamical Mechanical Analysis) and Molecular Dynamics (MD) simulations. By applying sinusoidal loading on PPXC films at different temperatures and frequencies, the complex modulus and glass transition temperature (Tg) of the PPXC were obtained. The predicted Tg determined from the temperature-dependent density change in the MD model is consistent with the results in our measurements and previous works. Furthermore, with Time-Temperature Superposition Principle (TTSP), we successfully determined the master curve of PPXC, for the first time, which is critical for the parylene reliability study of bio-MEMS devices.

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