Features of Structural Changes in the Near-Surface Aluminum Layer Under Various Schemes of Ion Implantation

DS Kryzhevich and KP Zolnikov and AV Korchuganov, PROCEEDINGS OF THE XXV CONFERENCE ON HIGH-ENERGY PROCESSES IN CONDENSED MATTER (HEPCM 2017), 1893, 030126 (2017).

DOI: 10.1063/1.5007584

The molecular dynamics simulation of structural rearrangements in the surface layer of aluminum samples under ion implantation of various intensities was carried out. The features of the internal structure and the crystallographic orientation of the irradiated crystallite were taken into account. To describe the interatomic interaction many-body potentials obtained in the framework of the embedded atom method were used. Irradiation of the 100 surface results in much less number of formed defects than irradiation of the 110 and 111 ones. When irradiating surfaces with beams of relatively low energy grains remain unchanged in the surface region and the formation of stacking faults was not observed. At a high intensity of irradiation, the near-surface layer of the crystallite melts. In the absence of heat removal, the centers of crystallization become grains lying on the boundary of the solid and liquid phases. Those grains increase due to the adjustment of the atoms of the liquid phase to their lattice. As a result, the grain size in the near-surface region increases.

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