Effects of temperature and strain rate on fracture properties of amorphous silicon nitride

NB Liao and X Tao and M Zhang and W Xue, JOURNAL OF MATERIALS SCIENCE- MATERIALS IN ELECTRONICS, 22, 1346-1349 (2011).

DOI: 10.1007/s10854-011-0311-3

The high temperature mechanical behaviours of silicon nitride are difficult to be investigated because it is hard to measure these structural changes in the mechanical test. Atomistic simulation is a proper way to investigate the structural-mechanical mechanism at high temperatures. In this paper, the structural and fracture properties of amorphous silicon nitride (a-Si(3)N(4)) were studied at different temperatures. The simulation results consist with the experiments on radial distribution function, temperature-dependent yield stress and Young's modulus. Moreover, the effects of strain rate on mechanical properties were also studied, the results show a higher strain rate lead to larger yield stress and Young's modulus.

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