Signatures of self-interstitials in laser-melted and regrown silicon

T Menold and M Ametowobla and JH Werner, AIP ADVANCES, 11, 055212 (2021).

DOI: 10.1063/5.0050161

Photoluminescence spectroscopy investigates epitaxially regrown silicon single crystals after pulsed laser melting for atomic-level lattice defects. The measurements identify a transition from a regime free of defect-related spectral lines to a regime in which spectral lines appear originating from small self-interstitial clusters. This finding of self- interstitial clusters indicates supersaturated concentrations of self- interstitials within the regrown volume. Molecular dynamics simulations confirm that recrystallization velocities v(re) approximate to 1 m/s after laser melting lead to supersaturation of both self-interstitials and vacancies. Their concentrations c(i) and c(v) in the regrown volumes are c(i) approximate to c(v) approximate to 10(17) cm(-3). An analytical model based on time-dependent nucleation theory shows a very strong dependence of self-interstitial aggregation to clusters on the cooling rate after solidification. This model explains the transition identified by photoluminescence spectroscopy.

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