Mechanical properties of beta-Si3N4 thin layers in basal plane under tension: A molecular dynamics study

XF Lu and M Chen and L Fan and C Wang and HJ Wang and GJ Qiao, APPLIED PHYSICS LETTERS, 102, 031907 (2013).

DOI: 10.1063/1.4788692

The mechanical properties and failure mechanisms of the beta-Si3N4 thin layers in basal plane under uniaxial tension are investigated by using molecular dynamics simulations. It is found that the thin layers display a nonlinear stress-strain relationship first at epsilon<0.06, and then a linear response at 0.06http://dx.doi.org/10.1063/1.4788692

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