Laser induced diamond/graphite structure for all-carbon deep-ultraviolet photodetector

F Li and H Bao and Y Li and F Ma and H Wang, APPLIED SURFACE SCIENCE, 636, 157818 (2023).

DOI: 10.1016/j.apsusc.2023.157818

Graphite was formed by in-situ structural conversion from sp(3) to sp(2) hybridized carbon via KrF excimer. The surface morphology of diamond was changed to nanoparticles after laser irradiation. Raman peak related to amorphous carbon emerged after laser treatments with energy of 10 similar to 25 mJ cm(-2). X-ray photoelectron spectroscopy exhibited that surface graphitization could take place under low laser energy of 2 mJ cm(-2). The structural transformation of diamond after laser irradiation was further studied by cross-sectional transmission electron microscopy (TEM) analysis. The TEM results displayed that the diamond/graphite interface was gradually transformed from diamond to graphite, and the transformation process was verified by molecular dynamics simulations. The specific contact resistance of 7.83 x 10(-5) Omega cm(2) for the diamond/graphite structure was acquired by transmission line model. Meanwhile, the barrier height of the graphite/diamond contact was obtained to be 0.54 eV. In the end, an all-carbon deep-ultraviolet photodetector with diamond/graphite structure was developed. The all- carbon photodetector exhibited relatively high responsivity of 15 mA/W under 220 nm illumination, and a fast transient response of 86 mu s.

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