Dynamic behavior and thermoelastic damping of circular single-layered black phosphorus-based mass sensor

YQ Zhang and ZB Li and F Xu, ACTA MECHANICA, 234, 5477-5489 (2023).

DOI: 10.1007/s00707-023-03681-5

The highly in-plane mechanical anisotropic black phosphorus (BP) has widely used in nanoelectromechanical systems. The dynamic behavior and thermoelastic damping of circular single-layered BP-based (CSLBP-based) mass sensor are investigated. Molecular dynamic (MD) simulations and circular orthotropic elastic plate (COEP) attached a concentrate mass are adopted to obtain the natural frequency of CSLBP attached atomic mass. Thermoelastic damping of CSLBP attached atomic mass is calculated by COEP attached a concentrate mass considering thermal effect. The effect of attachment mass and CSLBP size on the natural frequency of CSLBP attached atomic mass are discussed. The natural frequency of CSLBP-based mass sensor is very sensitive to the attachment mass. Thermoelastic damping of CSLBP-based attached atomic mass depends on the radius of CSLBP-based mass sensor, the attachment mass and the environmental temperature. The thermoelastic damping of CSLBP-based mass sensor decreased with increasing the attachment mass and the radius of CSLBP. The COEP can predict the dynamic behavior of CSLBP-based mass sensor.

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